JPS6236541Y2 - - Google Patents

Info

Publication number
JPS6236541Y2
JPS6236541Y2 JP1985091584U JP9158485U JPS6236541Y2 JP S6236541 Y2 JPS6236541 Y2 JP S6236541Y2 JP 1985091584 U JP1985091584 U JP 1985091584U JP 9158485 U JP9158485 U JP 9158485U JP S6236541 Y2 JPS6236541 Y2 JP S6236541Y2
Authority
JP
Japan
Prior art keywords
substrate
roller
liquid
transfer device
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985091584U
Other languages
English (en)
Japanese (ja)
Other versions
JPS621780U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985091584U priority Critical patent/JPS6236541Y2/ja
Publication of JPS621780U publication Critical patent/JPS621780U/ja
Application granted granted Critical
Publication of JPS6236541Y2 publication Critical patent/JPS6236541Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1985091584U 1985-06-19 1985-06-19 Expired JPS6236541Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985091584U JPS6236541Y2 (en]) 1985-06-19 1985-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985091584U JPS6236541Y2 (en]) 1985-06-19 1985-06-19

Publications (2)

Publication Number Publication Date
JPS621780U JPS621780U (en]) 1987-01-08
JPS6236541Y2 true JPS6236541Y2 (en]) 1987-09-17

Family

ID=30647604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985091584U Expired JPS6236541Y2 (en]) 1985-06-19 1985-06-19

Country Status (1)

Country Link
JP (1) JPS6236541Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5063028B2 (ja) * 2006-04-28 2012-10-31 富士フイルム株式会社 塗布方法及び装置並びに塗布ライン用ローラ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224505A (en) * 1975-08-19 1977-02-24 Matsushita Electric Ind Co Ltd Tape guide
JPS5954563U (ja) * 1982-09-30 1984-04-10 株式会社東芝 現像およびエツチング装置
JPS60103352A (ja) * 1983-11-11 1985-06-07 Tokyo Ohka Kogyo Co Ltd フオトレジスト形成用積層板製造装置

Also Published As

Publication number Publication date
JPS621780U (en]) 1987-01-08

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